供应

工艺应用

简称

In-situ substrate preclean 预清洁

PC

Ion-beam modification of material and surface properties
材料和表面改性

IBSM

- Surface polishing or smoothing 表面抛光

- Surface nanostructures and texturing
表面纳米结构和纹理

- Ion figuring and enhancement 离子计算和增强

- Ion trimming and tuning 离子修整和调谐

- Surface-activated bonding 表面激活键合

SAB

Ion-beam-assisted deposition 辅助镀膜

IBAD

Ion-beam etching 离子蚀刻

IBE

- Reactive ion-beam etching 活性离子束蚀刻

RIBE

- Chemically assisted ion-beam etching 化学辅助离子束蚀刻

CAIBE

Ion-beam sputter deposition 离子溅射

IBSD

- Reactive ion-beam sputter deposition 反应离子溅射

RIBSD

- Biased target ion-beam sputter deposition
偏压靶离子束溅射

BTIBSD

Direct deposition 直接沉积

DD

- Hard and functional coatings
硬质和功能性涂料